Size analysis of ethanol cluster ions and their sputtering effects on solid surfaces

G. H. Takaoka, K. Nakayama, T. Okada, M. Kawashita

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

When vapors of liquid materials such as ethanol were ejected through a nozzle into a vacuum region, ethanol clusters were produced at the vapor pressures larger than 1 atm. The cluster size measured by the TOF method was distributed between a few hundreds and a few thousands, which was different depending on the vapor pressure. Several kinds of solid surfaces such as Si(100) and metal surfaces were irradiated at different acceleration voltages with ethanol cluster ion beams, and chemical and physical sputtering with a high sputtering yield was achieved. In addition, the sputtered surfaces were very flat at an atomic level. The dependence of the sputtered depth on the incident angle of the ethanol cluster ion beams was investigated for the Si(100) surfaces. The sputtered depth had a peak value at an incident angle less than 60 degrees, and the incident angle corresponding to the peak value decreased with decreasing acceleration voltage.

Original languageEnglish
Title of host publicationION IMPLANTATION TECHNOLOGY
Subtitle of host publication16th International Conference on Ion Implantation Technology, IIT 2006
PublisherAmerican Institute of Physics Inc.
Pages321-324
Number of pages4
ISBN (Print)0735403651, 9780735403659
DOIs
Publication statusPublished - 2006
EventION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology, IIT 2006 - Marseille, France
Duration: 2006 Jun 112006 Nov 16

Publication series

NameAIP Conference Proceedings
Volume866
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

OtherION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology, IIT 2006
CountryFrance
CityMarseille
Period06/6/1106/11/16

Keywords

  • Cluster ion beam
  • Ethanol cluster
  • Sputtering
  • TOF method

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Takaoka, G. H., Nakayama, K., Okada, T., & Kawashita, M. (2006). Size analysis of ethanol cluster ions and their sputtering effects on solid surfaces. In ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology, IIT 2006 (pp. 321-324). (AIP Conference Proceedings; Vol. 866). American Institute of Physics Inc.. https://doi.org/10.1063/1.2401522