SiO2/grooved Al electrode/LiTaO3 and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used

Michio Kadota; Tetsuya Kimura

doi:10.1143/JJAP.45.4647

SiO₂/grooved Al electrode/LiTaO₃ and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used

Michio Kadota, Tetsuya Kimura

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

A surface acoustic wave (SAW) substrate for a duplexer, such as a Personal Communication Service handy phone system in the U.S.A., is required to have a good temperature stability, an optimum electromechanical coupling factor, and a large reflection coefficient. The conventional method of depositing a SiO ₂ film on a thick Al electrode/LiTaO₃ substrate to improve its temperature coefficient of frequency (TCF) is not effective for SAW resonator-type devices, because good frequency characteristics are not obtained due to large convex portions on the surface of SiO₂ film. However, resonators having a large reflection coefficient, an excellent TCF, and good frequency characteristics were realized using the following two new structures: (I) SiO₂ film/grooved Al electrode/LiTaO₃ structure and (II) reflection of a shear horizontal (SH) wave at free edges on a SiO ₂ film/thin Al electrode/LiTaO₃ structure substrate.

Original language	English
Pages (from-to)	4647-4650
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	45
Issue number	5 B
DOIs	https://doi.org/10.1143/JJAP.45.4647
Publication status	Published - 2006 May 25
Externally published	Yes

Keywords

Edge reflection
Excellent TCF
Grooved AI electrode
Resonator
SiO

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.45.4647

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Kadota, M., & Kimura, T. (2006). SiO₂/grooved Al electrode/LiTaO₃ and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 45(5 B), 4647-4650. https://doi.org/10.1143/JJAP.45.4647

SiO₂/grooved Al electrode/LiTaO₃ and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used. / Kadota, Michio; Kimura, Tetsuya.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 45, No. 5 B, 25.05.2006, p. 4647-4650.

Research output: Contribution to journal › Article › peer-review

Kadota, M & Kimura, T 2006, 'SiO₂/grooved Al electrode/LiTaO₃ and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 45, no. 5 B, pp. 4647-4650. https://doi.org/10.1143/JJAP.45.4647

Kadota M, Kimura T. SiO₂/grooved Al electrode/LiTaO₃ and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2006 May 25;45(5 B):4647-4650. doi: 10.1143/JJAP.45.4647

Kadota, Michio ; Kimura, Tetsuya. / SiO₂/grooved Al electrode/LiTaO₃ and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2006 ; Vol. 45, No. 5 B. pp. 4647-4650.

@article{aae194309fc344ab9c0b7f93e073a651,

title = "SiO2/grooved Al electrode/LiTaO3 and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used",

abstract = "A surface acoustic wave (SAW) substrate for a duplexer, such as a Personal Communication Service handy phone system in the U.S.A., is required to have a good temperature stability, an optimum electromechanical coupling factor, and a large reflection coefficient. The conventional method of depositing a SiO 2 film on a thick Al electrode/LiTaO3 substrate to improve its temperature coefficient of frequency (TCF) is not effective for SAW resonator-type devices, because good frequency characteristics are not obtained due to large convex portions on the surface of SiO2 film. However, resonators having a large reflection coefficient, an excellent TCF, and good frequency characteristics were realized using the following two new structures: (I) SiO2 film/grooved Al electrode/LiTaO3 structure and (II) reflection of a shear horizontal (SH) wave at free edges on a SiO 2 film/thin Al electrode/LiTaO3 structure substrate.",

keywords = "Edge reflection, Excellent TCF, Grooved AI electrode, Resonator, SiO",

author = "Michio Kadota and Tetsuya Kimura",

year = "2006",

month = may,

day = "25",

doi = "10.1143/JJAP.45.4647",

language = "English",

volume = "45",

pages = "4647--4650",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "5 B",

}

TY - JOUR

T1 - SiO2/grooved Al electrode/LiTaO3 and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used

AU - Kadota, Michio

AU - Kimura, Tetsuya

PY - 2006/5/25

Y1 - 2006/5/25

N2 - A surface acoustic wave (SAW) substrate for a duplexer, such as a Personal Communication Service handy phone system in the U.S.A., is required to have a good temperature stability, an optimum electromechanical coupling factor, and a large reflection coefficient. The conventional method of depositing a SiO 2 film on a thick Al electrode/LiTaO3 substrate to improve its temperature coefficient of frequency (TCF) is not effective for SAW resonator-type devices, because good frequency characteristics are not obtained due to large convex portions on the surface of SiO2 film. However, resonators having a large reflection coefficient, an excellent TCF, and good frequency characteristics were realized using the following two new structures: (I) SiO2 film/grooved Al electrode/LiTaO3 structure and (II) reflection of a shear horizontal (SH) wave at free edges on a SiO 2 film/thin Al electrode/LiTaO3 structure substrate.

AB - A surface acoustic wave (SAW) substrate for a duplexer, such as a Personal Communication Service handy phone system in the U.S.A., is required to have a good temperature stability, an optimum electromechanical coupling factor, and a large reflection coefficient. The conventional method of depositing a SiO 2 film on a thick Al electrode/LiTaO3 substrate to improve its temperature coefficient of frequency (TCF) is not effective for SAW resonator-type devices, because good frequency characteristics are not obtained due to large convex portions on the surface of SiO2 film. However, resonators having a large reflection coefficient, an excellent TCF, and good frequency characteristics were realized using the following two new structures: (I) SiO2 film/grooved Al electrode/LiTaO3 structure and (II) reflection of a shear horizontal (SH) wave at free edges on a SiO 2 film/thin Al electrode/LiTaO3 structure substrate.

KW - Edge reflection

KW - Excellent TCF

KW - Grooved AI electrode

KW - Resonator

KW - SiO

UR - http://www.scopus.com/inward/record.url?scp=33744481025&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33744481025&partnerID=8YFLogxK

U2 - 10.1143/JJAP.45.4647

DO - 10.1143/JJAP.45.4647

M3 - Article

AN - SCOPUS:33744481025

VL - 45

SP - 4647

EP - 4650

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 5 B

ER -