SiO2/grooved Al electrode/LiTaO3 and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used

Michio Kadota, Tetsuya Kimura

Research output: Contribution to journal › Article

18 Citations (Scopus)

Abstract

A surface acoustic wave (SAW) substrate for a duplexer, such as a Personal Communication Service handy phone system in the U.S.A., is required to have a good temperature stability, an optimum electromechanical coupling factor, and a large reflection coefficient. The conventional method of depositing a SiO 2 film on a thick Al electrode/LiTaO3 substrate to improve its temperature coefficient of frequency (TCF) is not effective for SAW resonator-type devices, because good frequency characteristics are not obtained due to large convex portions on the surface of SiO2 film. However, resonators having a large reflection coefficient, an excellent TCF, and good frequency characteristics were realized using the following two new structures: (I) SiO2 film/grooved Al electrode/LiTaO3 structure and (II) reflection of a shear horizontal (SH) wave at free edges on a SiO 2 film/thin Al electrode/LiTaO3 structure substrate.

Original languageEnglish
Pages (from-to)4647-4650
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number5 B
DOIs
Publication statusPublished - 2006 May 25

Keywords

  • Edge reflection
  • Excellent TCF
  • Grooved AI electrode
  • Resonator
  • SiO

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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