Abstract
To estimate the concentration of single vacancies in slowly cooled Si crystals, we calculated the diffusion length and pair formation of vacancies during cooling. The results showed that the concentration of quenched-in single vacancies at room temperature was much lower than that at high temperature.
Original language | English |
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Pages (from-to) | 123-125 |
Number of pages | 3 |
Journal | Physica B: Condensed Matter |
Volume | 401-402 |
DOIs | |
Publication status | Published - 2007 Dec 15 |
Keywords
- Diffusion
- Divacancy
- Si
- Single vacancy
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering