Single crystalline AlN film formed by direct nitridation of sapphire using aluminum oxynitride buffer

Wataru Nakao, Hiroyuki Fukuyama

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Single crystalline AlN film formed by direct nitridation of sapphire using aluminum oxynitride buffer'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds