Simultaneous observation of two dimensional electron gas and polarization in AlGaN/GaN heterostructure using scanning nonlinear dielectric microscopy

Kotaro Hirose, Yasunori Goto, Norimichi Chinone, Yasuo Cho

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

The AlGaN/GaN heterostructure has two-dimensional electron gas (2DEG) and electric polarization. We observed both of them simultaneously in the cross section of the AlGaN/GaN heterostructure by scanning nonlinear dielectric microscopy (SNDM), which can visualize both carrier and polarization distributions. The AlGaN/GaN heterostructure was cross-sectioned at an angle of 20° from the [0001] axis and, hence, the perpendicular components of the polarizations of AlGaN and GaN were observed. Moreover, the 2DEG distribution was confirmed in a range of >10nm at the AlGaN/GaN interface.

Original languageEnglish
Article number08NB13
JournalJapanese journal of applied physics
Volume55
Issue number8
DOIs
Publication statusPublished - 2016 Aug

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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