Simultaneous observation of ferroelectric domain patterns by scanning nonlinear dielectric microscope and surface morphology by atomic force microscope

A new type of scanning nonlinear dielectric microscope (SNDM), with an additional function of simultaneous observations of surface morphology, has been developed. This was achieved by employing an electrically conducting atomic force microscopy cantilever as a probe needle. Using this new SNDM, simultaneous measurements of several ferroelectric materials, such as lead zirconate titanate (PZT) thin films on both SrTiO₃ and MgO substrates, were performed. Topographic and domain images were simultaneously obtained from the same location on the materials. Finally, the resolution of the SNDM was theoretically calculated and it was revealed that atomic scale resolution is possible using the SNDM technique.