TY - JOUR
T1 - Simultaneous measurement of gas concentration and temperature by the ball surface acoustic wave sensor
AU - Yamanaka, Kazushi
AU - Akao, Shingo
AU - Takeda, Nobuo
AU - Tsuji, Toshihiro
AU - Oizumi, Toru
AU - Tsukahara, Yusuke
N1 - Publisher Copyright:
© 2017 The Japan Society of Applied Physics.
PY - 2017/7
Y1 - 2017/7
N2 - We have developed a ball surface acoustic wave (SAW) trace moisture sensor with an amorphous silica sensitive film and realized wide-range measurement from 0.017 ppmv [a frost point (FP) of %99 °C] to 6.0 × 103 ppmv (0 °C FP). However, since the sensitivity of the sensor depends on the temperature, measurement results are disturbed when the temperature largely changes. To overcome this problem, we developed a method to simultaneously measure temperature and gas concentration using a ball SAW sensor. Temperature and concentration is derived by solving equations for the delay time change at two frequencies. When the temperature had a large jump, the delay time change was significantly disturbed, but the water concentration was almost correctly measured, by compensating the sensitivity change using measured temperature. The temperature measured by a ball SAW sensor will also be used to control the ball temperature. This method will make a ball SAW sensor reliable in environments of varying temperatures.
AB - We have developed a ball surface acoustic wave (SAW) trace moisture sensor with an amorphous silica sensitive film and realized wide-range measurement from 0.017 ppmv [a frost point (FP) of %99 °C] to 6.0 × 103 ppmv (0 °C FP). However, since the sensitivity of the sensor depends on the temperature, measurement results are disturbed when the temperature largely changes. To overcome this problem, we developed a method to simultaneously measure temperature and gas concentration using a ball SAW sensor. Temperature and concentration is derived by solving equations for the delay time change at two frequencies. When the temperature had a large jump, the delay time change was significantly disturbed, but the water concentration was almost correctly measured, by compensating the sensitivity change using measured temperature. The temperature measured by a ball SAW sensor will also be used to control the ball temperature. This method will make a ball SAW sensor reliable in environments of varying temperatures.
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U2 - 10.7567/JJAP.56.07JC04
DO - 10.7567/JJAP.56.07JC04
M3 - Article
AN - SCOPUS:85025084796
VL - 56
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7
M1 - 07JC04
ER -