Simultaneous formation of a metallic Mn layer and a MnOx/ MnSixOy barrier layer by chemical vapor deposition at 250°C

Atsuko Kurokawa, Yuji Sutou, Junichi Koike, Tatsufumi Hamada, Kenji Matsumoto, Hiroyuki Nagai, Kaoru Maekawa, Hiroki Kanato

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