Simultaneous determination of the optical constants and thickness of very thin films by using soft-x-ray reflectance measurements

Jianlin Cao, Mihiro Yanagihara, Masaki Yamamoto, Yoshinori Goto, Takeshi Namioka

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

A nonlinear, least-squares curve-fitting method is described that simultaneously determines the optical constants and the thickness of a very thin (100-Å) film from reflectance versus angle of incidence (R-Θ) data measured in the soft-x-ray region. The method is applied to R-Θ data obtained for very thin, sputtered films of carbon (65 ÅA thick) and gold (94 Åthick) at photon energies of 60-900 eV. The results show that the present method is capable of accuratelydetermining the thickness of very thin films even for transparent materials, and that the obtained optical constants are in good agreement with values reported for films with a thickness of 1000 Å.

Original languageEnglish
Pages (from-to)2013-2017
Number of pages5
JournalApplied optics
Volume33
Issue number10
DOIs
Publication statusPublished - 1994 Jan 1

Keywords

  • Curve fitting
  • Optical constants
  • Reflectance
  • Soft x rays
  • Thin film

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Simultaneous determination of the optical constants and thickness of very thin films by using soft-x-ray reflectance measurements'. Together they form a unique fingerprint.

Cite this