Simulation Study of Total-Electron-Yield X-ray Standing-Wave Spectra of Mo/SiC/Si/SiC and Mo/Si Multilayers

Takeo Ejima, Yasuji Muramatsu, Hisataka Takenaka, Makoto Watanabe

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    4 Citations (Scopus)

    Abstract

    Total-electron-yield X-ray standing-wave (TEY-XSW) spectra of Mo/SiC/Si/SiC multilayers (Muramatsu et al., Jpn. J. Appl. Phys., 41 (2002) 4250.) were simulated by the use of the calculation method for TEY spectra of multilayers. The existence of a 2Å thick SiO2 and a 18Å thick Mo layers on the periodic Mo/SiC/Si/SiC multilayer was confirmed. In addition, the simulation study on Mo/Si multilayers covered with top Mo layers was performed. The TEY-XSW spectra were sensitive to the thickness of the top Mo layer as for the spectral shapes and peak positions. It was made clear that the TEY-XSW method is useful to elucidate the multilayer structure near the top layer.

    Original languageEnglish
    Title of host publicationSynchrotron Radiation Instrumentation
    Subtitle of host publication8th International Conference on Synchrotron Radiation Instrumentation
    PublisherAmerican Institute of Physics Inc.
    Pages1126-1129
    Number of pages4
    ISBN (Electronic)0735401799
    DOIs
    Publication statusPublished - 2004 May 12
    Event8th International Conference on Synchrotron Radiation Instrumentation - San Francisco, United States
    Duration: 2003 Aug 252003 Aug 29

    Publication series

    NameAIP Conference Proceedings
    Volume705
    ISSN (Print)0094-243X
    ISSN (Electronic)1551-7616

    Other

    Other8th International Conference on Synchrotron Radiation Instrumentation
    Country/TerritoryUnited States
    CitySan Francisco
    Period03/8/2503/8/29

    ASJC Scopus subject areas

    • Physics and Astronomy(all)

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