Simulation Method of Flows in Transitional and Free-Molecular Regimes: Application to Pumping of a Narrow Gap between Large Plates

Kenichi Nanbu, Yasuo Watanabe, Shigeru Yonemura

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)939-945
Number of pages7
JournalShinku/Journal of the Vacuum Society of Japan
Volume43
Issue number10
DOIs
Publication statusPublished - 2000 Jan
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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