Simulation Method of Flows in Transitional and Free-Molecular Regimes: Application to Pumping of a Narrow Gap between Large Plates

Kenichi Nanbu; Yasuo Watanabe; Shigeru Yonemura

doi:10.3131/jvsj.43.939

Simulation Method of Flows in Transitional and Free-Molecular Regimes: Application to Pumping of a Narrow Gap between Large Plates

Kenichi Nanbu, Yasuo Watanabe, Shigeru Yonemura

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	939-945
Number of pages	7
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	43
Issue number	10
DOIs	https://doi.org/10.3131/jvsj.43.939
Publication status	Published - 2000 Jan
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.3131/jvsj.43.939

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title = "Simulation Method of Flows in Transitional and Free-Molecular Regimes: Application to Pumping of a Narrow Gap between Large Plates",

author = "Kenichi Nanbu and Yasuo Watanabe and Shigeru Yonemura",

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Simulation Method of Flows in Transitional and Free-Molecular Regimes: Application to Pumping of a Narrow Gap between Large Plates

ASJC Scopus subject areas

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