Simplified method to prepare atomically-ordered TiO 2 (1 1 0)-(1 × 1) surfaces with steps and terraces

Ryota Shimizu, Katsuya Iwaya, Takeo Ohsawa, Tetsuya Hasegawa, Tomihiro Hashizume, Taro Hitosugi

    Research output: Contribution to journalArticlepeer-review

    4 Citations (Scopus)


    An effective way to prepare atomically-ordered rutile TiO 2 (1 1 0) surfaces that have distinct step and terrace structures suitable for oxide thin film deposition is demonstrated. Only a two-step procedure, consisting of 20% HF etching and UHV-annealing at 1100 °C, was required to yield a clean (1 × 1) structure with step and terrace structures. Investigation of the surface using scanning tunneling microscopy, low-energy electron diffraction, and Auger electron spectroscopy reveals that carbon contamination is removed at around 800 °C, and straight steps with clear terraces appear at around 1000 °C.

    Original languageEnglish
    Pages (from-to)4867-4869
    Number of pages3
    JournalApplied Surface Science
    Issue number11
    Publication statusPublished - 2011 Mar 15


    • Oxide electronics
    • Scanning probe microscopy
    • Surface science

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films


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