Simple transfer technology for fabrication of TFT backplane for flexible displays

Toshihiro Yamamoto, Tatsuya Takei, Yoshiki Nakajima, Yoshihide Fujisaki, Tadahiro Furukawa, Masayuki Hosoi, Akihiro Kinoshita, Hideo Fujikake

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

A new simple transfer technology for the realization of flexible thin-film transistors (TFTs) on a plastic substrate has been developed. The basic principle of the proposed method is that, after all the fabrication processes for the TFT array on a temporary adhesive layer coated on a glass substrate have been completed, the TFT is then transferred onto a plastic film. A 5.8-in-diagonal wide-quarter quarter video graphics array (QVGA) organic TFT array and a 5-in-diagonal QVGA oxide TFT array were fabricated on the temporary adhesive layer. We confirmed that the degree of substrate deformation for the proposed technology was less than that for the conventional direct formation method. We also transferred both TFT arrays to plastic films and confirmed that no significant degradation in the electrical characteristics of the TFTs has occurred as a result of the transfer process. It is considered that this will be a key technology for the fabrication of large flexible displays with TFT backplanes.

Original languageEnglish
Article number26
Pages (from-to)1662-1667
Number of pages6
JournalIEEE Transactions on Industry Applications
Volume48
Issue number5
DOIs
Publication statusPublished - 2012
Externally publishedYes

Keywords

  • Deformation rate
  • flexible display
  • low-temperature fabrication
  • manufacturing processes
  • organic light-emitting diodes (OLEDs)
  • organic thin-film transistor (TFT)
  • oxide TFT
  • plastic film
  • transfer method

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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