Abstract
Two simple and easy processes have been demonstrated to fabricate two-dimensional (2-D) nanostructure array on Si surfaces by using only focused beam patterning and wet etching. First, we took advantage of the enhanced etch rate (ER) of electron-beam-exposed SiO2 in HF based solution. A 30-nm thick oxide layer was shot with 30-keV focused-electron beam with spot doses ranging from 20 to 140 pC/dot. After development of SiO2 layer in 1% HF solution, the Si substrate was etched by hydrazine (N2H4H2O) to form pyramidal etch-pits. By using this process, 50-nm concave nanopyramid array (NPA) with 100-nm period can be fabricated successfully. Second, we utilized the newly found retarded ER of ion-beam-exposed Si in hydrazine. 2-D arrays of dots were written directly on the Si substrate with 60-keV Si focused-ion beam (FIB) with a dose of 5×1014 ions/cm2. The Si substrate was then dipped in hydrazine solution, where the unexposed region was selectively etched by hydrazine. By using this process, 100-nm convex NPA with 200-nm period can be fabricated easily. The performance of the proposed processes is compared in terms of pattern size, throughput and process diversity.
Original language | English |
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Pages (from-to) | 599-603 |
Number of pages | 5 |
Journal | Applied Surface Science |
Volume | 162 |
DOIs | |
Publication status | Published - 2000 Aug 1 |
Externally published | Yes |
Event | 5th International Symposium on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-5) - Provence, France Duration: 1999 Jul 6 → 1999 Jul 9 |
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films