Simple modeling and simulation of the squeeze film effect and transient response of the MEMS device

Kazuyuki Minami; Tadao Matsunaga; Masayoshi Esashi

doi:10.1109/memsys.1999.746851

Simple modeling and simulation of the squeeze film effect and transient response of the MEMS device

Kazuyuki Minami, Tadao Matsunaga, Masayoshi Esashi

Research output: Contribution to conference › Paper › peer-review

7 Citations (Scopus)

Abstract

In this paper, the novel theoretical squeeze film equations of infinitely long and rectangular parallel plates system, which are applicable for large displacement simulation, are derived. The simple simulation method by using these equations is developed. A silicon-micromachined test device like an accelerometer was fabricated and the transient responses of the device were measured. The simulation was also carried out by using the simple model. The simulated and experimental results were compared, and they have good agreement. This method makes it easy to make the model and the simulation, and is useful at the beginning of the design of MEMS devices affected by the squeeze film effect.

Original language	English
Pages	338-343
Number of pages	6
DOIs	https://doi.org/10.1109/memsys.1999.746851
Publication status	Published - 1999 Jan 1
Event	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA Duration: 1999 Jan 17 → 1999 Jan 21

Other

Other	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
City	Orlando, FL, USA
Period	99/1/17 → 99/1/21

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/memsys.1999.746851

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Simple modeling and simulation of the squeeze film effect and transient response of the MEMS device. / Minami, Kazuyuki; Matsunaga, Tadao; Esashi, Masayoshi.

1999. 338-343 Paper presented at Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, Orlando, FL, USA.

Research output: Contribution to conference › Paper › peer-review

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abstract = "In this paper, the novel theoretical squeeze film equations of infinitely long and rectangular parallel plates system, which are applicable for large displacement simulation, are derived. The simple simulation method by using these equations is developed. A silicon-micromachined test device like an accelerometer was fabricated and the transient responses of the device were measured. The simulation was also carried out by using the simple model. The simulated and experimental results were compared, and they have good agreement. This method makes it easy to make the model and the simulation, and is useful at the beginning of the design of MEMS devices affected by the squeeze film effect.",

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N2 - In this paper, the novel theoretical squeeze film equations of infinitely long and rectangular parallel plates system, which are applicable for large displacement simulation, are derived. The simple simulation method by using these equations is developed. A silicon-micromachined test device like an accelerometer was fabricated and the transient responses of the device were measured. The simulation was also carried out by using the simple model. The simulated and experimental results were compared, and they have good agreement. This method makes it easy to make the model and the simulation, and is useful at the beginning of the design of MEMS devices affected by the squeeze film effect.

AB - In this paper, the novel theoretical squeeze film equations of infinitely long and rectangular parallel plates system, which are applicable for large displacement simulation, are derived. The simple simulation method by using these equations is developed. A silicon-micromachined test device like an accelerometer was fabricated and the transient responses of the device were measured. The simulation was also carried out by using the simple model. The simulated and experimental results were compared, and they have good agreement. This method makes it easy to make the model and the simulation, and is useful at the beginning of the design of MEMS devices affected by the squeeze film effect.

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Y2 - 17 January 1999 through 21 January 1999

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Simple modeling and simulation of the squeeze film effect and transient response of the MEMS device

Abstract

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