Silicon/III-V material active layer heterointegrated vertical PIN waveguide photodiode by direct bonding

Linghan Li, Akio Higo, Ryo Takigawa, Eiji Higurashi, Masakazu Sugiyama, Yoshiaki Nakano

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    A silicon/III-V material active layer heterointegrated vertical PIN waveguide photodiode was developed and realized by silicon MEMS process and plasma assisted direct bonding. The InGaAsP Multiple Quantum Well (MQW) was integrated onto a SOI platform with highly doped micro rib by O2/Ar plasma assisted bonding which greatly improves the electrical property between the heterointerface. The photon-electron conversion of the photodiode was successfully demonstrated. The waveguide photodiode shows around 50% quantum efficiency at 1550nm and TE polarization.

    Original languageEnglish
    Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
    Pages2502-2505
    Number of pages4
    DOIs
    Publication statusPublished - 2011 Sep 1
    Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
    Duration: 2011 Jun 52011 Jun 9

    Other

    Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
    CountryChina
    CityBeijing
    Period11/6/511/6/9

    Keywords

    • direct bonding
    • hybrid waveguide
    • Silicon/III-V heterointegration
    • vertical PIN photodiode

    ASJC Scopus subject areas

    • Hardware and Architecture
    • Electrical and Electronic Engineering

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  • Cite this

    Li, L., Higo, A., Takigawa, R., Higurashi, E., Sugiyama, M., & Nakano, Y. (2011). Silicon/III-V material active layer heterointegrated vertical PIN waveguide photodiode by direct bonding. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2502-2505). [5969752] https://doi.org/10.1109/TRANSDUCERS.2011.5969752