Silicon suspended resonant grating filters fabricated from a silicon-on-insulator wafer

Jia Sheng Ye, Naoki Matsuyama, Yoshiaki Kanamori, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithograph- technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations b- a rigorous coupled wave method prove to be in agreement with the experimental observations.

Original languageEnglish
Pages (from-to)851-853
Number of pages3
JournalIEEE Photonics Technology Letters
Volume20
Issue number10
DOIs
Publication statusPublished - 2008 May 15

Keywords

  • Guided mode resonance
  • Micro- and nanolithograph- technologies
  • Microoptical filter
  • Rigorous coupled wave method

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Silicon suspended resonant grating filters fabricated from a silicon-on-insulator wafer'. Together they form a unique fingerprint.

Cite this