Silicon shot gas epitaxy: Dose-controlled digital epitaxy

K. J. Kim, M. Suemitsu, N. Miyamoto

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Silicon shot gas epitaxy: Dose-controlled digital epitaxy'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds