Silicon self-suspended resonant grating filters at telecommunication wavelength

Jia Sheng Ye, Naoki Matsuyama, Yoshiaki Kanamori, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A silicon self-suspended grating was fabricated using nanolithography technology. Experimental results showed that it served as an optical filter through guide mode resonance, which agreed with theoretical simulations by rigorous coupled wave method.

Original languageEnglish
Title of host publication2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS
DOIs
Publication statusPublished - 2008 Sep 15
EventConference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008 - San Jose, CA, United States
Duration: 2008 May 42008 May 9

Publication series

Name2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS

Other

OtherConference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008
CountryUnited States
CitySan Jose, CA
Period08/5/408/5/9

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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