Silicon photonic waveguide devices tunable by in-plane actuation

K. Hane, H. M. Chu, T. Sasaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Variable functional devices using MEMS/NEMS actuators are attractive to reconfigurable densely integrated optical circuits in silicon photonics, especially in optical telecommunication. Here, some silicon photonic waveguide devices, which are variable by integrated in-plane actuators, are presented. Coupler switches and wide-range tunable micro rings are discussed.

Original languageEnglish
Title of host publication2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781509010356
DOIs
Publication statusPublished - 2016 Sep 13
Event21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
Duration: 2016 Jul 312016 Aug 4

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume2016-September
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
CountrySingapore
CitySingapore
Period16/7/3116/8/4

Keywords

  • comb actuator
  • micro ring
  • silicon photonics
  • switch

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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