@inproceedings{7fbc9663b07143cd915ac3b43840a28d,
title = "Silicon photonic waveguide devices tunable by in-plane actuation",
abstract = "Variable functional devices using MEMS/NEMS actuators are attractive to reconfigurable densely integrated optical circuits in silicon photonics, especially in optical telecommunication. Here, some silicon photonic waveguide devices, which are variable by integrated in-plane actuators, are presented. Coupler switches and wide-range tunable micro rings are discussed.",
keywords = "comb actuator, micro ring, silicon photonics, switch",
author = "K. Hane and Chu, {H. M.} and Takashi Sasaki",
year = "2016",
month = sep,
day = "13",
doi = "10.1109/OMN.2016.7565880",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",
note = "21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",
}