TY - JOUR
T1 - Silicon photonic microelectromechanical switch using lateral adiabatic waveguide couplers
AU - Nagai, Takumi
AU - Hane, Kazuhiro
N1 - Funding Information:
Authors thank Drs. Y. Kanamori, T. Sasaki, Y. Zhai and W. Wang and other researchers for their useful suggestions and discussions. The fabrications were carried out in MNC of Tohoku University.
Publisher Copyright:
© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.
PY - 2018/12/24
Y1 - 2018/12/24
N2 - A silicon photonic waveguide switch using adiabatic couplers with lateral comb-drive actuators is designed, fabricated, and tested for microelectromechanical optical matrix switch. One of the waveguides of the adiabatic coupler is moved laterally by three actuators for varying the coupler gap, which enables to switch the path of the waveguides. The coupler waveguides with 250 nm thickness consist of a movable tapered waveguide from 400 nm to 500 nm in width and 50 μm in length and a straight waveguide of 400 nm in width. The three actuators are ultra-small electrostatic comb-drive and move the two movable tapered waveguides. The switch’s transmission characteristics were measured as a function of the coupler gap. Around a coupler gap of 109 nm, the port isolation of 16.7 dB was obtained. The switch’s insertion loss was roughly estimated to be less than 1 dB. The switching time was 36.7 μsec under the present experimental condition. Moreover, 64 switches were arrayed in a 125 μm period square mash waveguide and an 8 x 8 matrix switch was composed. The matrix switch was also tested.
AB - A silicon photonic waveguide switch using adiabatic couplers with lateral comb-drive actuators is designed, fabricated, and tested for microelectromechanical optical matrix switch. One of the waveguides of the adiabatic coupler is moved laterally by three actuators for varying the coupler gap, which enables to switch the path of the waveguides. The coupler waveguides with 250 nm thickness consist of a movable tapered waveguide from 400 nm to 500 nm in width and 50 μm in length and a straight waveguide of 400 nm in width. The three actuators are ultra-small electrostatic comb-drive and move the two movable tapered waveguides. The switch’s transmission characteristics were measured as a function of the coupler gap. Around a coupler gap of 109 nm, the port isolation of 16.7 dB was obtained. The switch’s insertion loss was roughly estimated to be less than 1 dB. The switching time was 36.7 μsec under the present experimental condition. Moreover, 64 switches were arrayed in a 125 μm period square mash waveguide and an 8 x 8 matrix switch was composed. The matrix switch was also tested.
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U2 - 10.1364/OE.26.033906
DO - 10.1364/OE.26.033906
M3 - Article
C2 - 30650822
AN - SCOPUS:85059213166
VL - 26
SP - 33906
EP - 33917
JO - Optics Express
JF - Optics Express
SN - 1094-4087
IS - 26
ER -