Silicon microring resonator connected with submicorn comb actuator

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A 500nm wide 260nm thick 63.4μm long silicon microring waveguide was suspended in air by connecting to a comb actuator with the low-loss suspension arms. The airgap between the microring and the input/output waveguides was adjusted by a voltage applied to the comb actuator to vary the coupling efficiency. Transmittance from the input to the drop waveguides was varied from 0% at the gap of 750nm to 50% maximum value (about 30dB) at the voltages from 0V to 28V. Under the drop condition, the bandwidth of the drop signal was 0.5nm, corresponding to the Q-value of 3100.

Original languageEnglish
Title of host publication2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
Pages23-24
Number of pages2
DOIs
Publication statusPublished - 2008 Oct 23
Event2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, Germany
Duration: 2008 Aug 112008 Aug 14

Publication series

Name2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Other

Other2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
CountryGermany
CityFreiburg
Period08/8/1108/8/14

Keywords

  • Comb actuator
  • Microring
  • Silicon photonics
  • Silicon waveguide

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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