Silicon micromachining and micromachines

Masayoshi Esashi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Advanced principles of integrated circuit fabrication can be applied for three-dimensional microstructures. This technology based on photofabrication is called micromachining. The micromachining makes it possible to fabricate micromachines which have sensors, actuators and electronic circuits on a silicon wafer. Microflow control systems and integrated mechanical sensors were fabricated. Micromachining and micromachines of silicon are reviewed.

Original languageEnglish
Pages (from-to)181-187
Number of pages7
JournalWEAR
Volume168
Issue number1-2
DOIs
Publication statusPublished - 1993 Sep 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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