Silicon Micromachined Two-Dimensional Galvano Optical Scanner

N. Asada, Hidetoshi Matsuki, K. Minami, Masayoshi Esashi

Research output: Contribution to journalArticle

128 Citations (Scopus)

Abstract

A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil.

Original languageEnglish
Pages (from-to)4647-4649
Number of pages3
JournalIEEE Transactions on Magnetics
Volume30
Issue number6
DOIs
Publication statusPublished - 1994 Jan 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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