Silicon-hydrogen bonds in silicon oxide near the SiO
                        2
                        /Si interface

Hiroki Ogawa; Naozumi Terada; Kazuhisa Sugiyama; Kazunori Moriki; Noriyuki Miyata; Takayuki Aoyama; Rinshi Sugino; Takashi Ito; Takeo Hattori

doi:10.1016/0169-4332(92)90347-Z

Silicon-hydrogen bonds in silicon oxide near the SiO ₂ /Si interface

Hiroki Ogawa, Naozumi Terada, Kazuhisa Sugiyama, Kazunori Moriki, Noriyuki Miyata, Takayuki Aoyama, Rinshi Sugino, Takashi Ito, Takeo Hattori

Research output: Contribution to journal › Article › peer-review

23 Citations (Scopus)

Abstract

The role of hydrogen peroxide in RCA standard clean was roughly clarified by angle-resolved photoelectron spectroscopy and infrared absorption spectroscopy such that the oxidation, by basic hydrogen peroxide results in a negligible amount of SiH bonds in native oxide, while the oxidation by acidic hydrogen peroxide results in a small amount of SiH bonds in native oxide. It is also found that oxidation in a boiling solution of HNO ₃ results in large amount of SiH bonds in native oxide as in the case of oxidation in a hot solution of HNO ₃ .

Original language	English
Pages (from-to)	836-840
Number of pages	5
Journal	Applied Surface Science
Volume	56-58
Issue number	PART 2
DOIs	https://doi.org/10.1016/0169-4332(92)90347-Z
Publication status	Published - 1992 Jan 1

ASJC Scopus subject areas

Surfaces, Coatings and Films

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Ogawa, H., Terada, N., Sugiyama, K., Moriki, K., Miyata, N., Aoyama, T., Sugino, R., Ito, T., & Hattori, T. (1992). Silicon-hydrogen bonds in silicon oxide near the SiO ₂ /Si interface Applied Surface Science, 56-58(PART 2), 836-840. https://doi.org/10.1016/0169-4332(92)90347-Z

Silicon-hydrogen bonds in silicon oxide near the SiO ₂ /Si interface . / Ogawa, Hiroki; Terada, Naozumi; Sugiyama, Kazuhisa; Moriki, Kazunori; Miyata, Noriyuki; Aoyama, Takayuki; Sugino, Rinshi; Ito, Takashi; Hattori, Takeo.

In: Applied Surface Science, Vol. 56-58, No. PART 2, 01.01.1992, p. 836-840.

Research output: Contribution to journal › Article › peer-review

Ogawa, H, Terada, N, Sugiyama, K, Moriki, K, Miyata, N, Aoyama, T, Sugino, R, Ito, T & Hattori, T 1992, ' Silicon-hydrogen bonds in silicon oxide near the SiO ₂ /Si interface ', Applied Surface Science, vol. 56-58, no. PART 2, pp. 836-840. https://doi.org/10.1016/0169-4332(92)90347-Z

Ogawa, Hiroki ; Terada, Naozumi ; Sugiyama, Kazuhisa ; Moriki, Kazunori ; Miyata, Noriyuki ; Aoyama, Takayuki ; Sugino, Rinshi ; Ito, Takashi ; Hattori, Takeo. / Silicon-hydrogen bonds in silicon oxide near the SiO ₂ /Si interface In: Applied Surface Science. 1992 ; Vol. 56-58, No. PART 2. pp. 836-840.

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AU - Sugino, Rinshi

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