Silicon-germanium alloy prepared by laser-induced pyrolysis of organogermanium nanocluster spin-coated on Si substrate

Akira Watanabe, Masashi Unno, Fusao Hojo, Takao Miwa

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

The silicon-germanium alloys prepared by laser-induced pyrolysis of organogermanium nanocluster (OGE) spin-coated on Si substrate were discussed. An inorganic film was found to be prepared by heat treatment of the OGE film accompanying the elimination of organic substituents. The structural and morphological changes using increasing the number of laser shots were also studied using micro-Raman spectroscopy and scanning electron microscopy (SEM).

Original languageEnglish
Pages (from-to)3043-3047
Number of pages5
JournalMaterials Letters
Volume57
Issue number20
DOIs
Publication statusPublished - 2003 Jun 1

Keywords

  • Laser-induced pyrolysis
  • Micro-Raman spectroscopy
  • Organogermanium nanocluster
  • Silicon-germanium alloys

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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