@inproceedings{11e9bc51d5004664af6152217c58db88,
title = "Silicon carbide microfabrication by silicon lost molding for glass press molds",
abstract = "Two novel silicon carbide (SiC) microfabrication processes for SiC glass-press molds were developed. One is silicon lost molding combined with SiC chemical vapor deposition (CVD) and SiC reaction-sintering (RS). A SiC film was deposited on a micromachined silicon mold, and backed with a SiC reaction-sintered body. The surface roughness of the SiC mold was 0.05-0.08 μm Ra, and worse than required by the glass-press mold. This was caused by poly-crystal SiC growth during hot isotropic pressing (HIP), which was confirmed from X-ray diffraction (XRD) patterns of the CVD SiC film before/after HIP. The other is silicon lost molding combined with SiC-CVD and SiC solid-state reaction bonding (SSRB). A SiC film deposited on the micromachined silicon mold was bonded with a SiC ceramic substrate using a Ni interface layer. The surface of the SiC mold was very smooth (0.004-0.008 μm Ra) without poly-crystallization of the CVD SiC film. The SiC mold was pressed to a glass to confirm its high-temperature strength. The Pyrex glass was shaped by the SiC mold without a void, and no damage to the SiC mold was observed.",
keywords = "Bonding, Chemical vapor deposition, Glass, Hip, Pressing, Rough surfaces, Semiconductor films, Silicon carbide, Surface roughness, X-ray diffraction",
author = "T. Itoh and S. Tanaka and Li, {Jing Feng} and R. Watanabe and M. Esashi",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/SENSOR.2003.1215301",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "254--257",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
note = "12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
}