Silicon Carbide Micro-reaction-sintering using a multilayer silicon mold

Shinya Sugimoto, Shuji Tanaka, Jing Feng Li, Ryuzo Watanabe, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

16 Citations (Scopus)

Abstract

This paper describes a novel process, `Silicon Carbide Micro-reaction-sintering', to fabricate high-aspect-ratio silicon carbide microstructures. This process consists of micromachining of silicon molds, filling of material powders (α-silicon carbide, graphite, silicon and phenol resin) into the molds, bonding of the molds with adhesive and reaction-sintering by hot isostatic pressing (HIP). Using our process, we have successfully fabricated silicon carbide microrotors of 5 and 10 mm diameters for micromachined gas turbines. We observed the cross section of the microrotors with a scanning electron microscope (SEM). The SEM observation demonstrated that the material powder was densely reaction-sintered by HIP. We also investigated the compositions of the microrotors by X-ray diffraction (XRD) analysis. The XRD analyses proved that graphite in the material powder reacted with melted silicon derived from the mold, and consequently β-silicon carbide was produced around the α-silicon carbide originally included in the material powder.

Original languageEnglish
Pages775-780
Number of pages6
Publication statusPublished - 2000 Jan 1
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: 2000 Jan 232000 Jan 27

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period00/1/2300/1/27

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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