Silicon bulk micromachining in Tohoku university

Kazuyuki Minami, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

Abstract

Micro systems which are small sized but relatively complicated intelligent systems were fabricated based on bulk silicon micromachining. Extremely sensitive sensors with thin beam structure, packaged micromechanical sensors for inertia measurement, microactuators as microvalve and optical scanner and active catheter which moves flexibly like a snake in a blood vessel were developed Silicon nano-wire growth by electric field evaporation using UHV STM and novel three-dimensional micromachining as deep RIE were developed for the fabrication of the microsystems.

Original languageEnglish
Pages (from-to)769-775
Number of pages7
JournalAmerican Society of Mechanical Engineers, Aerospace Division (Publication) AD
Volume52
Publication statusPublished - 1996 Dec 1

ASJC Scopus subject areas

  • Mechanical Engineering
  • Space and Planetary Science

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