Silicon bulk micromachining

Masayoshi Esashi, Yoichi Haga

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings
EditorsAndre Dittmar, David Beebe
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages7-12
Number of pages6
ISBN (Electronic)0780366034, 9780780366039
DOIs
Publication statusPublished - 2000 Jan 1
Event1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, MMB 2000 - Lyon, France
Duration: 2000 Oct 122000 Oct 14

Publication series

Name1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

Other

Other1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, MMB 2000
CountryFrance
CityLyon
Period00/10/1200/10/14

ASJC Scopus subject areas

  • Engineering(all)

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