This paper reports on recent development of micro instrumentations based on advanced silicon technologies for nanoengineering and nanoscience. Demonstration of some miniaturized and integrated micro/nanomechanics, including four-terminal microprobes, optical bow-tie probes, nanomechanical sensors, multiprobe for future high-density data storage, and carbon nanotube mechanics and carbon nanotube electron sources for electron emission devices, are presented. .
|Number of pages||4|
|Publication status||Published - 2005 Dec 1|
|Event||IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, Japan|
Duration: 2005 Dec 6 → 2005 Dec 9
|Other||IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005|
|Period||05/12/6 → 05/12/9|
ASJC Scopus subject areas