Silicon-based micro/nanomechanics for nanoengineering

Research output: Contribution to conferencePaperpeer-review

Abstract

This paper reports on recent development of micro instrumentations based on advanced silicon technologies for nanoengineering and nanoscience. Demonstration of some miniaturized and integrated micro/nanomechanics, including four-terminal microprobes, optical bow-tie probes, nanomechanical sensors, multiprobe for future high-density data storage, and carbon nanotube mechanics and carbon nanotube electron sources for electron emission devices, are presented. .

Original languageEnglish
Pages1969-1972
Number of pages4
Publication statusPublished - 2005 Dec 1
EventIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, Japan
Duration: 2005 Dec 62005 Dec 9

Other

OtherIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005
CountryJapan
CityTakamatsu
Period05/12/605/12/9

ASJC Scopus subject areas

  • Engineering(all)

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