Silicon-based micro-polymer electrolyte fuel cells

Kyong Bok Min, Shuji Tanaka, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

32 Citations (Scopus)


In this paper, we present micro-polymer electrolyte fuel cells (μ-PEFCs) with advantages such as full wafer-level process capability, miniaturization and integration with various MEMS components. We propose two kinds of novel structures, "Alternating structure" and "Coplanar structure", which are different from a conventional bipolar/unipolar structure. The μ-PEFCs with the alternating structure was fabricated and tested at room temperature using pure hydrogen as fuel. The output power was not high (μW class). The reasons include 1) unstable PEM adhesion, 2) poor catalytic electrodes, and 3) cross-talk among electrodes on the same substrate. We found that one of the most important things for cell performance is keeping a stable contact between the PEM and the electrodes.

Original languageEnglish
Number of pages4
Publication statusPublished - 2003 Jul 23
Externally publishedYes
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: 2003 Jan 192003 Jan 23


OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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