A silicon resonant angular rate sensor using lead zirconate titanate (Pb(Zr, Ti)O3, or PZT) thin film for detecting sensor vibration was fabricated by silicon micromachining technology, and its basic properties were examined. PZT was deposited on a silicon wafer directly with a multitarget sputtering system. Since fabricated PZT thin films have poor piezoelectric characteristics, these films could not be used for driving the mass of the sensor. For this reason, the mass of the sensor was driven by an external piezoelectric actuator instead of PZT films. The test device could be successfully used as an angular rate sensor.
|Number of pages||9|
|Journal||Sensors and Materials|
|Publication status||Published - 1999 Dec 1|
- Angular rate sensor
ASJC Scopus subject areas
- Materials Science(all)