Silicon Adiabatic Waveguide Coupler Switch Using Lateral Comb Actuators

T. Nagai, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A matrix-Type silicon photonic waveguide switch using adiabatic couplers with lateral comb-drive actuators is studied. One of the waveguides of the coupler is moved laterally by three actuators for switching. The movable waveguide is the tapered waveguide of the adiabatic coupler. The three actuators are ultra-small electrostatic comb-driven and move the connected tapered waveguides. The transmission of single switch was measured as a function of coupler gap. Around a coupler gap of 110 nm, the switch-on state was obtained. The resonant frequency of the movable part of switch was about 162.3 kHz.

Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
PublisherIEEE Computer Society
ISBN (Print)9781509063727
DOIs
Publication statusPublished - 2018 Sep 4
Event23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland
Duration: 2018 Jul 292018 Aug 2

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume2018-July
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
CountrySwitzerland
CityLausanne
Period18/7/2918/8/2

Keywords

  • Si photonics
  • comb actuator
  • switch
  • waveguide

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Nagai, T., & Hane, K. (2018). Silicon Adiabatic Waveguide Coupler Switch Using Lateral Comb Actuators. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings [8454556] (International Conference on Optical MEMS and Nanophotonics; Vol. 2018-July). IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454556