Silicon Adiabatic Waveguide Coupler Switch Using Lateral Comb Actuators

T. Nagai; K. Hane

doi:10.1109/OMN.2018.8454556

Silicon Adiabatic Waveguide Coupler Switch Using Lateral Comb Actuators

T. Nagai, K. Hane

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A matrix-Type silicon photonic waveguide switch using adiabatic couplers with lateral comb-drive actuators is studied. One of the waveguides of the coupler is moved laterally by three actuators for switching. The movable waveguide is the tapered waveguide of the adiabatic coupler. The three actuators are ultra-small electrostatic comb-driven and move the connected tapered waveguides. The transmission of single switch was measured as a function of coupler gap. Around a coupler gap of 110 nm, the switch-on state was obtained. The resonant frequency of the movable part of switch was about 162.3 kHz.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
Publisher	IEEE Computer Society
ISBN (Print)	9781509063727
DOIs	https://doi.org/10.1109/OMN.2018.8454556
Publication status	Published - 2018 Sep 4
Event	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland Duration: 2018 Jul 29 → 2018 Aug 2

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	2018-July
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
Country	Switzerland
City	Lausanne
Period	18/7/29 → 18/8/2

Keywords

Si photonics
comb actuator
switch
waveguide

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMN.2018.8454556

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Cite this

Nagai, T., & Hane, K. (2018). Silicon Adiabatic Waveguide Coupler Switch Using Lateral Comb Actuators. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings [8454556] (International Conference on Optical MEMS and Nanophotonics; Vol. 2018-July). IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454556

Silicon Adiabatic Waveguide Coupler Switch Using Lateral Comb Actuators. / Nagai, T.; Hane, K.

International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. IEEE Computer Society, 2018. 8454556 (International Conference on Optical MEMS and Nanophotonics; Vol. 2018-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nagai, T & Hane, K 2018, Silicon Adiabatic Waveguide Coupler Switch Using Lateral Comb Actuators. in International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings., 8454556, International Conference on Optical MEMS and Nanophotonics, vol. 2018-July, IEEE Computer Society, 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, Lausanne, Switzerland, 18/7/29. https://doi.org/10.1109/OMN.2018.8454556

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abstract = "A matrix-Type silicon photonic waveguide switch using adiabatic couplers with lateral comb-drive actuators is studied. One of the waveguides of the coupler is moved laterally by three actuators for switching. The movable waveguide is the tapered waveguide of the adiabatic coupler. The three actuators are ultra-small electrostatic comb-driven and move the connected tapered waveguides. The transmission of single switch was measured as a function of coupler gap. Around a coupler gap of 110 nm, the switch-on state was obtained. The resonant frequency of the movable part of switch was about 162.3 kHz.",

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