Signal propagation characteristics in polyimide optical wave-guide with micro-mirrors for optical multichip module

Yasuhiro Kuwana; Akinori Hirose; Hiroyuki Kurino; Mitsumasa Koyanagi

doi:10.1143/JJAP.38.2660

Signal propagation characteristics in polyimide optical wave-guide with micro-mirrors for optical multichip module

Yasuhiro Kuwana, Akinori Hirose, Hiroyuki Kurino, Mitsumasa Koyanagi

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

In order to develop key technologies for a multichip module with optical interconnection, a test module using polyimide optical waveguides (POWs) with micro-mirrors and a photodiode array was successfully fabricated. Through the fabrication of this test module, we developed such basic technologies as POW formation, vertical optical coupling with micro-mirrors buried in POWs, chip bonding with copper bumps, and so on. The signal propagation in POWs was characterized by the detection of vertical output signals at micro-mirrors. From these characteristics, the transmission loss caused by passing a mirror was evaluated to be 0.16 dB.

Original language	English
Pages (from-to)	2660-2663
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	38
Issue number	4 B
DOIs	https://doi.org/10.1143/JJAP.38.2660
Publication status	Published - 1999
Externally published	Yes

Keywords

MCM
Micro-mirror
Multi-fan-out
Parallel processor
Polyimide optical waveguide

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/JJAP.38.2660

Cite this

Signal propagation characteristics in polyimide optical wave-guide with micro-mirrors for optical multichip module. / Kuwana, Yasuhiro; Hirose, Akinori; Kurino, Hiroyuki et al.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 38, No. 4 B, 1999, p. 2660-2663.

Research output: Contribution to journal › Article › peer-review

@article{1739734b41db4080b44d2cfdd8ec7c82,

title = "Signal propagation characteristics in polyimide optical wave-guide with micro-mirrors for optical multichip module",

abstract = "In order to develop key technologies for a multichip module with optical interconnection, a test module using polyimide optical waveguides (POWs) with micro-mirrors and a photodiode array was successfully fabricated. Through the fabrication of this test module, we developed such basic technologies as POW formation, vertical optical coupling with micro-mirrors buried in POWs, chip bonding with copper bumps, and so on. The signal propagation in POWs was characterized by the detection of vertical output signals at micro-mirrors. From these characteristics, the transmission loss caused by passing a mirror was evaluated to be 0.16 dB.",

keywords = "MCM, Micro-mirror, Multi-fan-out, Parallel processor, Polyimide optical waveguide",

author = "Yasuhiro Kuwana and Akinori Hirose and Hiroyuki Kurino and Mitsumasa Koyanagi",

year = "1999",

doi = "10.1143/JJAP.38.2660",

language = "English",

volume = "38",

pages = "2660--2663",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "4 B",

}

TY - JOUR

T1 - Signal propagation characteristics in polyimide optical wave-guide with micro-mirrors for optical multichip module

AU - Kuwana, Yasuhiro

AU - Hirose, Akinori

AU - Kurino, Hiroyuki

AU - Koyanagi, Mitsumasa

PY - 1999

Y1 - 1999

N2 - In order to develop key technologies for a multichip module with optical interconnection, a test module using polyimide optical waveguides (POWs) with micro-mirrors and a photodiode array was successfully fabricated. Through the fabrication of this test module, we developed such basic technologies as POW formation, vertical optical coupling with micro-mirrors buried in POWs, chip bonding with copper bumps, and so on. The signal propagation in POWs was characterized by the detection of vertical output signals at micro-mirrors. From these characteristics, the transmission loss caused by passing a mirror was evaluated to be 0.16 dB.

AB - In order to develop key technologies for a multichip module with optical interconnection, a test module using polyimide optical waveguides (POWs) with micro-mirrors and a photodiode array was successfully fabricated. Through the fabrication of this test module, we developed such basic technologies as POW formation, vertical optical coupling with micro-mirrors buried in POWs, chip bonding with copper bumps, and so on. The signal propagation in POWs was characterized by the detection of vertical output signals at micro-mirrors. From these characteristics, the transmission loss caused by passing a mirror was evaluated to be 0.16 dB.

KW - MCM

KW - Micro-mirror

KW - Multi-fan-out

KW - Parallel processor

KW - Polyimide optical waveguide

UR - http://www.scopus.com/inward/record.url?scp=0347579308&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0347579308&partnerID=8YFLogxK

U2 - 10.1143/JJAP.38.2660

DO - 10.1143/JJAP.38.2660

M3 - Article

AN - SCOPUS:0347579308

SN - 0021-4922

VL - 38

SP - 2660

EP - 2663

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 4 B

ER -

Signal propagation characteristics in polyimide optical wave-guide with micro-mirrors for optical multichip module

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this