Signal propagation characteristics in polyimide optical wave-guide with micro-mirrors for optical multichip module

Yasuhiro Kuwana, Akinori Hirose, Hiroyuki Kurino, Mitsumasa Koyanagi

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

In order to develop key technologies for a multichip module with optical interconnection, a test module using polyimide optical waveguides (POWs) with micro-mirrors and a photodiode array was successfully fabricated. Through the fabrication of this test module, we developed such basic technologies as POW formation, vertical optical coupling with micro-mirrors buried in POWs, chip bonding with copper bumps, and so on. The signal propagation in POWs was characterized by the detection of vertical output signals at micro-mirrors. From these characteristics, the transmission loss caused by passing a mirror was evaluated to be 0.16 dB.

Original languageEnglish
Pages (from-to)2660-2663
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number4 B
DOIs
Publication statusPublished - 1999 Jan 1

Keywords

  • MCM
  • Micro-mirror
  • Multi-fan-out
  • Parallel processor
  • Polyimide optical waveguide

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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