SiGe epitaxial growth and its atomic-layer control

Junichi Murota, Masao Sakuraba

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)8-12
Number of pages5
JournalShinku/Journal of the Vacuum Society of Japan
Volume48
Issue number1
DOIs
Publication statusPublished - 2005 Jan 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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