Si-rich surface layer of photochemically deposited silicon nitride

T. Wadayama, H. Shibata, T. Kobayashi, A. Hatta

Research output: Contribution to journalArticle

5 Citations (Scopus)

Fingerprint Dive into the research topics of 'Si-rich surface layer of photochemically deposited silicon nitride'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science