Fingerprint
Dive into the research topics of 'Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching
K. Morimoto, K. Araki, K. Yamashita, K. Monta, M. Niwa
Research output: Contribution to journal › Article › peer-review
40
Citations
(Scopus)