Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching

K. Morimoto, K. Araki, K. Yamashita, K. Monta, M. Niwa

Research output: Contribution to journalArticlepeer-review

40 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching'. Together they form a unique fingerprint.

Engineering

Physics

Chemistry

Chemical Engineering

Material Science