Si micromachined pinhole and surrounding photodiode for incident beam position sensing and automatic alignment

Minoru Sasaki, Yuji Arai, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. The position signal obtained from a two or four cell type photodiode and position sensitive detector show the sensitivity even when the beam spot is near the center pinhole. Combined with the feedback control of the shape memory alloy actuator based on the obtained position signal, the pinhole is aligned automatically.

Original languageEnglish
Pages (from-to)115-118
Number of pages4
JournalOptical Review
Volume5
Issue number2
DOIs
Publication statusPublished - 1998 Jan 1

Keywords

  • Automatic alignment
  • Photodiode
  • Pinhole
  • Shape memory alloy
  • Si micromachining
  • Spatial filter

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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