Si-based micro-nanomechanics for ultimate sensing

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Resonant sensors for ultimate sensing are developed. By scaling down, the sensitivity of a magnetic resonance force microscopy probe is improved, and three-dimensional imaging of radical density in a poly-10-(4-vinylbenzyl)-10H-phenothiazine particle is demonstrated at room temperature. Also resonant thermal sensor with a microchannel is developed and applied to detect heat from a single brawn fat cell.

Original languageEnglish
Title of host publicationAdvanced CMOS-Compatible Semiconductor Devices 17
EditorsS. Selberherr, Y. Omura, J. A. Martino, J. P. Raskin, H. Ishii, F. Gamiz, B. Y. Nguyen
PublisherElectrochemical Society Inc.
Pages123-129
Number of pages7
Edition5
ISBN (Electronic)9781607685395
DOIs
Publication statusPublished - 2015 Jan 1
EventSymposium on Advanced CMOS-Compatible Semiconductor Devices 17 - 227th ECS Meeting - Chicago, United States
Duration: 2015 May 242015 May 28

Publication series

NameECS Transactions
Number5
Volume66
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherSymposium on Advanced CMOS-Compatible Semiconductor Devices 17 - 227th ECS Meeting
CountryUnited States
CityChicago
Period15/5/2415/5/28

Keywords

  • Magnetic resonance force microscopy
  • Microchannel
  • Nanowire probe
  • Resonant sensor
  • Resonant thermal sensor

ASJC Scopus subject areas

  • Engineering(all)

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