@inproceedings{a6252074b44449c3a8d5d5e26a0b7ad3,
title = "Si-based micro-nanomechanics for ultimate sensing",
abstract = "Resonant sensors for ultimate sensing are developed. By scaling down, the sensitivity of a magnetic resonance force microscopy probe is improved, and three-dimensional imaging of radical density in a poly-10-(4-vinylbenzyl)-10H-phenothiazine particle is demonstrated at room temperature. Also resonant thermal sensor with a microchannel is developed and applied to detect heat from a single brawn fat cell.",
keywords = "Magnetic resonance force microscopy, Microchannel, Nanowire probe, Resonant sensor, Resonant thermal sensor",
author = "Takahito Ono and Masaya Toda and Seo, {Yong Jun} and Naoki Inomata",
note = "Publisher Copyright: {\textcopyright} The Electrochemical Society.; Symposium on Advanced CMOS-Compatible Semiconductor Devices 17 - 227th ECS Meeting ; Conference date: 24-05-2015 Through 28-05-2015",
year = "2015",
doi = "10.1149/06605.0123ecst",
language = "English",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "5",
pages = "123--129",
editor = "Y. Omura and Martino, {J. A.} and Raskin, {J. P.} and S. Selberherr and H. Ishii and F. Gamiz and Nguyen, {B. Y.}",
booktitle = "Advanced CMOS-Compatible Semiconductor Devices 17",
edition = "5",
}