Short Range Finding using the FM Heterodyne Interferometry with Digital Signal Processing

Masafumi Ito; Kazuhiro Hane; Fumio Matsuda; Toshio Goto

doi:10.2493/jjspe.58.1005

Short Range Finding using the FM Heterodyne Interferometry with Digital Signal Processing

Masafumi Ito, Kazuhiro Hane, Fumio Matsuda, Toshio Goto

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

Abstract

An FM heterodyne interferometer using the digital signal processing has been constructed for the measurement of short distance (≥2.5 cm). The digital signal processing consists of the signal amplitude correction, the signal frequency measurement by averaging beat periods and the signal phase measurement. In the experiments, the distances from 2.5 cm to 10.5 cm have been measured with the accuracy less than 76.1 μmby the phase measurement. The error in the phase measurement was less than that in the frequency measurement by a factor of 3 to 6. The influences of the digital signal processing on the measurement accuracy have also been discussed.

Original language	English
Pages (from-to)	1005-1010
Number of pages	6
Journal	Journal of the Japan Society for Precision Engineering
Volume	58
Issue number	6
DOIs	https://doi.org/10.2493/jjspe.58.1005
Publication status	Published - 1992

Keywords

FM heterodyne interferometry
digital signal processing
laser diode
range finding

ASJC Scopus subject areas

Mechanical Engineering

Access to Document

10.2493/jjspe.58.1005

Fingerprint Dive into the research topics of 'Short Range Finding using the FM Heterodyne Interferometry with Digital Signal Processing'. Together they form a unique fingerprint.

Cite this

@article{a71507edf4bf493e924bdb7b9f1379e3,

title = "Short Range Finding using the FM Heterodyne Interferometry with Digital Signal Processing",

abstract = "An FM heterodyne interferometer using the digital signal processing has been constructed for the measurement of short distance (≥2.5 cm). The digital signal processing consists of the signal amplitude correction, the signal frequency measurement by averaging beat periods and the signal phase measurement. In the experiments, the distances from 2.5 cm to 10.5 cm have been measured with the accuracy less than 76.1 μmby the phase measurement. The error in the phase measurement was less than that in the frequency measurement by a factor of 3 to 6. The influences of the digital signal processing on the measurement accuracy have also been discussed.",

keywords = "FM heterodyne interferometry, digital signal processing, laser diode, range finding",

author = "Masafumi Ito and Kazuhiro Hane and Fumio Matsuda and Toshio Goto",

year = "1992",

doi = "10.2493/jjspe.58.1005",

language = "English",

volume = "58",

pages = "1005--1010",

journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",

issn = "0912-0289",

publisher = "Japan Society for Precision Engineering",

number = "6",

}

TY - JOUR

T1 - Short Range Finding using the FM Heterodyne Interferometry with Digital Signal Processing

AU - Ito, Masafumi

AU - Hane, Kazuhiro

AU - Matsuda, Fumio

AU - Goto, Toshio

PY - 1992

Y1 - 1992

N2 - An FM heterodyne interferometer using the digital signal processing has been constructed for the measurement of short distance (≥2.5 cm). The digital signal processing consists of the signal amplitude correction, the signal frequency measurement by averaging beat periods and the signal phase measurement. In the experiments, the distances from 2.5 cm to 10.5 cm have been measured with the accuracy less than 76.1 μmby the phase measurement. The error in the phase measurement was less than that in the frequency measurement by a factor of 3 to 6. The influences of the digital signal processing on the measurement accuracy have also been discussed.

AB - An FM heterodyne interferometer using the digital signal processing has been constructed for the measurement of short distance (≥2.5 cm). The digital signal processing consists of the signal amplitude correction, the signal frequency measurement by averaging beat periods and the signal phase measurement. In the experiments, the distances from 2.5 cm to 10.5 cm have been measured with the accuracy less than 76.1 μmby the phase measurement. The error in the phase measurement was less than that in the frequency measurement by a factor of 3 to 6. The influences of the digital signal processing on the measurement accuracy have also been discussed.

KW - FM heterodyne interferometry

KW - digital signal processing

KW - laser diode

KW - range finding

UR - http://www.scopus.com/inward/record.url?scp=0026883482&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0026883482&partnerID=8YFLogxK

U2 - 10.2493/jjspe.58.1005

DO - 10.2493/jjspe.58.1005

M3 - Article

AN - SCOPUS:0026883482

VL - 58

SP - 1005

EP - 1010

JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

SN - 0912-0289

IS - 6

ER -