Abstract
An FM heterodyne interferometer using the digital signal processing has been constructed for the measurement of short distance (≥2.5 cm). The digital signal processing consists of the signal amplitude correction, the signal frequency measurement by averaging beat periods and the signal phase measurement. In the experiments, the distances from 2.5 cm to 10.5 cm have been measured with the accuracy less than 76.1 μmby the phase measurement. The error in the phase measurement was less than that in the frequency measurement by a factor of 3 to 6. The influences of the digital signal processing on the measurement accuracy have also been discussed.
Original language | English |
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Pages (from-to) | 1005-1010 |
Number of pages | 6 |
Journal | Journal of the Japan Society for Precision Engineering |
Volume | 58 |
Issue number | 6 |
DOIs | |
Publication status | Published - 1992 |
Keywords
- FM heterodyne interferometry
- digital signal processing
- laser diode
- range finding
ASJC Scopus subject areas
- Mechanical Engineering