Short Range Finding using the FM Heterodyne Interferometry with Digital Signal Processing

Masafumi Ito, Kazuhiro Hane, Fumio Matsuda, Toshio Goto

Research output: Contribution to journalArticlepeer-review

Abstract

An FM heterodyne interferometer using the digital signal processing has been constructed for the measurement of short distance (≥2.5 cm). The digital signal processing consists of the signal amplitude correction, the signal frequency measurement by averaging beat periods and the signal phase measurement. In the experiments, the distances from 2.5 cm to 10.5 cm have been measured with the accuracy less than 76.1 μmby the phase measurement. The error in the phase measurement was less than that in the frequency measurement by a factor of 3 to 6. The influences of the digital signal processing on the measurement accuracy have also been discussed.

Original languageEnglish
Pages (from-to)1005-1010
Number of pages6
JournalJournal of the Japan Society for Precision Engineering
Volume58
Issue number6
DOIs
Publication statusPublished - 1992

Keywords

  • FM heterodyne interferometry
  • digital signal processing
  • laser diode
  • range finding

ASJC Scopus subject areas

  • Mechanical Engineering

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