TY - JOUR
T1 - Short Range Finding using the FM Heterodyne Interferometry with Digital Signal Processing
AU - Ito, Masafumi
AU - Hane, Kazuhiro
AU - Matsuda, Fumio
AU - Goto, Toshio
PY - 1992
Y1 - 1992
N2 - An FM heterodyne interferometer using the digital signal processing has been constructed for the measurement of short distance (≥2.5 cm). The digital signal processing consists of the signal amplitude correction, the signal frequency measurement by averaging beat periods and the signal phase measurement. In the experiments, the distances from 2.5 cm to 10.5 cm have been measured with the accuracy less than 76.1 μmby the phase measurement. The error in the phase measurement was less than that in the frequency measurement by a factor of 3 to 6. The influences of the digital signal processing on the measurement accuracy have also been discussed.
AB - An FM heterodyne interferometer using the digital signal processing has been constructed for the measurement of short distance (≥2.5 cm). The digital signal processing consists of the signal amplitude correction, the signal frequency measurement by averaging beat periods and the signal phase measurement. In the experiments, the distances from 2.5 cm to 10.5 cm have been measured with the accuracy less than 76.1 μmby the phase measurement. The error in the phase measurement was less than that in the frequency measurement by a factor of 3 to 6. The influences of the digital signal processing on the measurement accuracy have also been discussed.
KW - FM heterodyne interferometry
KW - digital signal processing
KW - laser diode
KW - range finding
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U2 - 10.2493/jjspe.58.1005
DO - 10.2493/jjspe.58.1005
M3 - Article
AN - SCOPUS:0026883482
VL - 58
SP - 1005
EP - 1010
JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
SN - 0912-0289
IS - 6
ER -