Short-range displacement detection from speckle interference using transparent thin-film photodiode

M. Sasaki, T. Hirano, X. Mi, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Speckle interference in space was monitored by using a newly developed transparent thin-film photodiode, which was fabricated by micromachining techniques. Since the sensitive region of the developed photodiode was thinner than one-half of the wavelength, an optical standing wave generated by the interference between two waves propagating in opposite directions was detected. This photodiode was used in a short-range displacement measurement in a speckle field. Using the sinusoidal phase modulation technique, object displacement was sensed with an accuracy of about 30 nm in a speckle granular structure.

Original languageEnglish
Pages (from-to)534-537
Number of pages4
JournalJournal of Optics A: Pure and Applied Optics
Volume2
Issue number6
DOIs
Publication statusPublished - 2000 Nov 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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