Shielded-loop-type onchip magnetic-field probe to evaluate radiated emission from thin-film noise suppressor

Masahiro Yamaguchi, Shota Koya, Hideki Torizuka, Satoshi Aoyama, Shoji Kawahito

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

A silicon integrated RF magnetic field probe has been designed and microfabricated using CMOS-silicon-on-insulator (SOI) technology with a 0.15-μm design rule on a high-resistivity silicon substrate. The size of the coil window was 180 × 180 μm3. Coil and electrodes were separated by a 530-μm-long stripline so as to avoid stray voltage induction at the electrode portion. This probe was applied to evaluate the radiated emission from a thin-film electromagnetic noise suppressor. It was clarified and shown that the field intensity was suppressed by 4.0 dB at the center of the signal line at 1 GHz.

Original languageEnglish
Pages (from-to)2370-2372
Number of pages3
JournalIEEE Transactions on Magnetics
Volume43
Issue number6
DOIs
Publication statusPublished - 2007 Jun 1

Keywords

  • Amorphous magnetic films
  • Complementary metal-oxide semiconductor (CMOS) analog integrated circuits (ICs)
  • Electromagnetic radiative interference
  • Magnetic resonance
  • Magnetic-field measurement
  • Packaging

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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