Nanometer electrodes of 0.085-μm width have been fabricated using direct electron beam lithography, normal lift-off techniques, and an O2-plasma cleaning system. These techniques have been applied to interdigital transducers used as surface acoustic wave (SAW) transducers in the SHF range. SAW filter experiments were performed in the SHF-range. Filters with minimum insertion loss of 15.0 dB at the center frequency of 5 GHz and 24 dB at 11 GHz were obtained.
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