SHF-range surface acoustic wave inter-digital transducers using electron beam exposure

K. Yamanouchi, Yasuo Cho, T. Meguro

Research output: Contribution to journalConference articlepeer-review

12 Citations (Scopus)

Abstract

Nanometer electrodes of 0.085-μm width have been fabricated using direct electron beam lithography, normal lift-off techniques, and an O2-plasma cleaning system. These techniques have been applied to interdigital transducers used as surface acoustic wave (SAW) transducers in the SHF range. SAW filter experiments were performed in the SHF-range. Filters with minimum insertion loss of 15.0 dB at the center frequency of 5 GHz and 24 dB at 11 GHz were obtained.

Original languageEnglish
Pages (from-to)115-118
Number of pages4
JournalUltrasonics Symposium Proceedings
Volume1
Publication statusPublished - 1988 Oct 1
EventIEEE 1988 Ultrasonics Symposium - Proceedings - Chicago, IL, USA
Duration: 1988 Oct 21988 Oct 5

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'SHF-range surface acoustic wave inter-digital transducers using electron beam exposure'. Together they form a unique fingerprint.

Cite this