Shaped silicon-crystal wafers obtained by plastic deformation and their application to silicon-crystal lenses

Kazuo Nakajima, Kozo Fujiwara, Wugen Pan, Hiroshi Okuda

Research output: Contribution to journalArticlepeer-review

43 Citations (Scopus)

Abstract

Plastic deformation is an unlikely process by which to mould pristine silicon wafers into three-dimensional shapes owing to the inevitable detrimental impact that the resulting mechanically induced defects would have on their electrical properties. However, if one were to find a way of doing so without substantial degradation of these properties, a range of new applications might be opened up. Here we report on the successful plastic deformation of silicon crystal wafers for the preparation of wafers with various shapes. A silicon wafer was set between dies and pressed at high temperatures. One application of shaped wafers is as well-shaped concave silicon crystal lenses or mirrors. The lattice plane of such a crystal lens has a curvature exactly along the surface. A concave spheroidal X-ray lens, in the form of two-dimensional Johann 1,2 and Johansson's2,3 monochromators, is proposed for an X-ray optical component system. We propose and demonstrate a new solar cell system with the concave silicon crystal mirror used as both a solar cell and a focused mirror. This system can make use of the reflected photons from solar cells.

Original languageEnglish
Pages (from-to)47-50
Number of pages4
JournalNature Materials
Volume4
Issue number1
Publication statusPublished - 2005 Jan

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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