TY - JOUR
T1 - Separation of electron-stimulated-desorption neutrals from outgassing originating from the grid surface of emission-controlled gauges
T2 - Studies with a heated-grid gauge
AU - Watanabe, Fumio
AU - Suemitsu, Maki
N1 - Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 1999
Y1 - 1999
N2 - With the construction of a heated-grid gauge, whose grid temperature can be varied independent of the electron emission, the two major barriers against precise pressure measurements in the extremely high vacuum (XHV) region, i.e., electron-stimulated-desorption neutrals and outgassing, have been successfully separated. In XHV, these two processes are both dominated by hydrogen molecules, while their strengths depend strongly on the grid temperature and the grid material. At elevated temperatures, outgassing caused by the out-diffusion of hydrogen atoms dissolved in the grid begin to dominate. This suggests use of a metal with low hydrogen solubility for XHV-compatible grid material.
AB - With the construction of a heated-grid gauge, whose grid temperature can be varied independent of the electron emission, the two major barriers against precise pressure measurements in the extremely high vacuum (XHV) region, i.e., electron-stimulated-desorption neutrals and outgassing, have been successfully separated. In XHV, these two processes are both dominated by hydrogen molecules, while their strengths depend strongly on the grid temperature and the grid material. At elevated temperatures, outgassing caused by the out-diffusion of hydrogen atoms dissolved in the grid begin to dominate. This suggests use of a metal with low hydrogen solubility for XHV-compatible grid material.
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U2 - 10.1116/1.582084
DO - 10.1116/1.582084
M3 - Article
AN - SCOPUS:0033454972
VL - 17
SP - 3467
EP - 3472
JO - Journal of Vacuum Science and Technology A
JF - Journal of Vacuum Science and Technology A
SN - 0734-2101
IS - 6
ER -