Separation by Bonding Si Islands (SBSI) for advanced CMOS LSI applications

Takashi Yamazaki, Shun Ichiro Ohmi, Shinya Morita, Hiroyuki Ohri, Junichi Murota, Masao Sakuraba, Hiroo Omi, Tetsushi Sakai

Research output: Contribution to journalArticlepeer-review

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Chemical Compounds

Engineering & Materials Science