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Separation by Bonding Si Islands (SBSI) for advanced CMOS LSI applications
Takashi Yamazaki, Shun Ichiro Ohmi, Shinya Morita, Hiroyuki Ohri, Junichi Murota, Masao Sakuraba, Hiroo Omi, Tetsushi Sakai
Research output: Contribution to journal › Article › peer-review