Separate evaluation of multiple film-forming species in chemical vapor deposition of SiC using high aspect-ratio microchannels

Kohei Shima, Noboru Sato, Yuichi Funato, Yasuyuki Fukushima, Takeshi Momose, Yukihiro Shimogaki

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Separate evaluation of multiple film-forming species in chemical vapor deposition of SiC using high aspect-ratio microchannels'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy