Sensors by micromachining

Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Photofabrication developed for integrated circuits can be used to fabricate sensors with three‐dimensional structures and devices with many other types of structures. The micromachining technology is useful in forming a small‐sized, high‐performance sensor system. Using this technology, it is possible to form a system with a sensor, actuator, and electronic circuit on a silicon wafer. A thermo‐flow sensor was fabricated with two microheaters to detect small gas flow. It was found that this device was sensitive to detect an extremely low gas flow with high linearity. This flow sensor was used for an integrated mass‐flow controller and as an integrated magnetic oxygen sensor. An integrated capacitive pressure sensor also was developed with a capacitive detection circuit. The new feed‐through structure used for this sensor was used for other integrated sensors such as a tactile imager.

Original languageEnglish
Pages (from-to)76-83
Number of pages8
JournalElectronics and Communications in Japan (Part II: Electronics)
Volume74
Issue number11
DOIs
Publication statusPublished - 1991

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Computer Networks and Communications
  • Electrical and Electronic Engineering

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